SiC高溫退火設(shè)備

所屬分類：

第三代半導(dǎo)體工藝設(shè)備

第一代半導(dǎo)體工藝設(shè)備

概要：

? 專門(mén)用于硅碳化合物(SiC) 的離子激活和退火處理，可實(shí)現(xiàn)SiC片在高溫真空環(huán)境下完成活性工藝 ? 設(shè)備適用于SiC基功率器件制造中的離子激活和退火工藝環(huán)節(jié) ? 加熱腔與工藝腔獨(dú)立密閉設(shè)計(jì)，提供工藝腔的潔凈度

關(guān)鍵詞：

SiC高溫退火

SiC高溫退火設(shè)備

產(chǎn)品概述/Product Introduction：

♦ 專門(mén)用于硅碳化合物(SiC) 的離子激活和退火處理，可實(shí)現(xiàn)SiC片在高溫真空環(huán)境下完成活性工藝

It is specially used for ion activation and annealing treatment of silicon carbon compound (SiC), which can realize the active process of Sic wafer in high temperature and vacuum environment.

♦ 設(shè)備適用于SiC基功率器件制造中的離子激活和退火工藝環(huán)節(jié)

The equipment is suitable for ion activation and annealing process in the manufacture of SiC-based power devices

♦ 加熱腔與工藝腔獨(dú)立密閉設(shè)計(jì)，提供工藝腔的潔凈度

The heating chamber and the process chamber are designed independently and sealed to provide the cleanliness of the process chamber

產(chǎn)品特點(diǎn)/Product Characteristics：

♦ 采用立式結(jié)構(gòu)、工藝控制好、溫度分布均勻、氣流穩(wěn)定

The vertical structure is adopted, the process is well controlled, the temperature distribution is uniform, and the airflow is stable

♦ Robot自動(dòng)傳送(可選)

Robot Auto Transfer (Optional)

♦ 多點(diǎn)控溫，溫度均勻

Multi-point temperature control, uniform temperature

♦ 具有多種報(bào)警功能及安全保護(hù)功能